主办：陕西省汽车工程学会
ISSN 1671-7988  CN 61-1394/TH
创刊：1976年
Automobile Applied Technology
Analysis of Particle Contamination in Packaging Links in Automotive Silicon Wafer Production Process
ZHENG Xiaodong
Automobile Applied Technology . 2023, (3): 150 -153 .  DOI: 10.16638/j.cnki.1671-7988.2023.03.028